SFT-D Pnuematic Series
The SFT series of shock-resistant active vibration isolators use pneumatic isolators as the main support in the vertical direction.
Product Model:
SFT180D Vibration Damping
SFT130D Vibration Damping
SFT100F Vibration Damping
SFT080D Vibration Damping
SFT060D Vibration Damping
SFT040D Vibration Damping
Introduction:
The SFT series of shock-resistant active vibration isolators use pneumatic isolators as the main support in the vertical direction. In the horizontal direction, they employ a mechanical inverted pendulum negative stiffness mechanism in parallel with a positive stifiness mechanism. Combined with active vibration control and precise positioning control in both the vertical and horizontal directions, the system achieves high-performance active vibration isolation and stabilization across six degrees of freedom. This design meets the high-performance vibration isolation and shock resistance stability requirements for a wide range of equipment used in back-end packaging, semiconductor inspection and metrology applications.
Features:
● Pneumatic Air Sping as Main Support
● Active Vibration Control and Precision Positioning Control
● High-Performance Vibration lsolation and Impact Resistance
● Mechanical Inverted Pendulum Negative Stiffness Mechanism in Parallel with Positive Stiffness
● Meets High-Performance Vibration lsolation and Shock Resistance Stability Requirements
● Application Fields: Back-End Packaging. Semiconductor inspection, Metrology, Etc
Specifications:
|
Model |
SFT180D |
SFT130D |
SFT100F |
|
Max Load Capacity With 4 Isolators |
4500~7200 kg |
3500~5200 kg |
2500~4000kg |
|
Isolator Dimensions |
380*370*260（L*W*H mm） |
290*290*259（L*W*H mm） |
260*260*259（L*W*H mm） |
|
Isolator Weight |
≤86kg |
≤67kg |
≤45kg |
|
Transmissibility |
≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz |
≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz |
≤-12dB@1Hz，≤-15dB@5Hz，≤-25dB@10Hz |
|
Horizontal Actuator Force per Isolator |
640N |
640N |
320N |
|
Max System Power |
1500W |
1500W |
700W |
|
Vertical Actuator Force per Isolator |
320N |
||
|
Passive Element |
Pneumatic Air Sping |
||
|
Degrees of Freedom |
6 |
||
|
Active Isolation Range |
0.8 ~ 150Hz |
||
|
Position Stability |
≤±8μm |
||
|
Model |
SFT080D |
SFT060D |
SFT040D |
|
Max Load Capacity With 4 Isolators |
2400~3200 kg |
1600~2400 kg |
1000~1600 kg |
|
Isolator Dimensions |
308*300*202（L*W*H mm） |
308*300*202（L*W*H mm） |
308*300*202（L*W*H mm） |
|
Isolator Weight |
≤49kg |
≤49kg |
≤47kg |
|
Passive Element |
Pneumatic Air Sping |
||
|
Degrees of Freedom |
6 |
||
|
Active Isolation Range |
0.8 ~ 150Hz |
||
|
Transmissibility |
≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz |
||
|
Position Stability |
≤±8μm |
||
|
Horizontal Actuator Force per Isolator |
640N |
||
|
Vertical Actuator Force per Isolator |
320N |
||
|
Max System Power |
1500W |
||
Related products
-
Four-axis industrial robot BRTIRPZ1825A
Contact UsFour-axis industrial robot
Arm span: 1800mm
Load: 25kg -
FM6D Master Drive
Contact UsOur slewing drives harness the principles of axial movement to generate robust radial torque, making them ideal for solar tracking systems that require precise positioning to optimize energy capture.
-
TEG Cleaning Furnace for Clean Filter Plateand Spinneret in Nonwovens Fabrics Industry
Contact UsThe spinnerets are first placed in a boiling solution containing 15-20%NaOH for 2 to 3 hours to remove most of the polymer on the plate.The plate is placed in a triethylene glycol solution at 260-280C,keeping for 12 hours, and then cooled.
-
Hastelloy C-276 Heat Exchanger F=1㎡
Contact UsThe Hastelloy C-276 heat exchanger is a high-performance thermal equipment designed for applications in highly corrosive environments.
Reviews
There are no reviews yet.